Sang Wook Park | Engineer
SK hynix
Sang Wook Park, Ph. D. is an engineer of Plug Etch team in R&D center, SK hynix since 2021. Prior to joining SK hynix, he was a manager of C&F group in etch business unit for Applied Materials, USA. He received a Ph. D. degree in materials science and engineering from University of California, San Diego, USA, a master degree from Stanford University, USA.
Appearances:
Future of Memory and Storage - Day 1 @ 08:50
Integrative HARC etching to overcome scaling limits and beyond in Flash Technology
In this work, we review integrated approaches to overcome challenges we have encountered in developing HARC etching process technology. In addition, to push beyond these limits, enabling technologies such as Metal Induced Crystallization (MIC), cell-to-cell bonding, and High Bandwidth Flash (HBF) should be introduced.
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